Taylor and Francis Lyshevski, S: Nano- and Micro-Electromechanical Systems

Nano- and Micro-Electromechanical Systems builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices and offers cutting-edge information on the subject, which applies to many fields. The book provides the background students need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement. This second edition now includes homework problems, examples, and a further reading section in every chapter as well as a separate solutions manual.