VDM Je, S: MEMS Microdevices: Microsepaker, Microphone, and Nano

For use in Completely-Inside-the-Canal (CIC)-type hearing aids, a Micro-Electro-Mechanical System- (MEMS-) based, electromagnetically-actuated microspeaker and capacitive directional microphone that can be tuned by metallic silver nanostructures. Precision mechanical options are provided for the devices developement for use in compact, low-power, and low-cost hearing aid applications and they address issues associated with the manufacture, fitting, and use of hearing aids. Results suggest that our micro-devices can help address a number of recurring manufacturer concerns and consumer preferences, including the need to decrease fabrication costs and total energy consumption, as well as strong consumer preferences for nearly invisible technology that functions reliably and can be precisely fit to patients' unique or changing hearing needs.