VDM Kim, S: Global Modeling and Peripheral Plasma

In the first part of this book, an improved volume- averaged global model is developed for a cylindrical electronegative plasma that is applicable over a wide range of electron densities, electronegativities, and pressures. It is applied to steady and pulsed-power oxygen discharges. The model incorporates effective volume and surface loss factors for ions and electrons combining three EN discharge regimes spanning the plasma parameters and gas pressures of interest. The second part explores both theoretically and experimentally a capacitive discharge connected through a dielectric or metal slot to a peripheral grounded region, which is used in commercial dual frequency capacitive discharges. Ignition of the peripheral plasma produces effects that are detrimental to processing performance. Discharge models are developed for diffusion and plasma maintenance in the slot, and plasma maintenance in the periphery. The theoretical predictions of ignition conditions are compared with experimental results. Instabilities associated with the loss of confinement are discovered, and a physical model is proposed.